Title:
COMPOSITE SUBSTRATE AND ELASTIC SURFACE WAVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2022/137646
Kind Code:
A1
Abstract:
Provided is a composite substrate having excellent heat resistance while confining the energy of elastic waves in a piezoelectric layer. The composite substrate according to an embodiment of the present invention has a piezoelectric layer and a reflective layer disposed on the reverse surface side of the piezoelectric layer. The reflective layer includes a high impedance layer and a low impedance layer containing silicon oxide. A region having a first structure occupies more than 70% in the high impedance layer.
Inventors:
YAMAMOTO TAKESHI (JP)
UNO YUDAI (JP)
INA HIROYOSHI (JP)
ASAI KEIICHIRO (JP)
TAI TOMOYOSHI (JP)
UNO YUDAI (JP)
INA HIROYOSHI (JP)
ASAI KEIICHIRO (JP)
TAI TOMOYOSHI (JP)
Application Number:
PCT/JP2021/030894
Publication Date:
June 30, 2022
Filing Date:
August 24, 2021
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
C30B23/00; C30B29/16; H03H9/25
Domestic Patent References:
| WO2020130128A1 | 2020-06-25 | |||
| WO2019054238A1 | 2019-03-21 |
Foreign References:
| JP2020098345A | 2020-06-25 | |||
| JP2019102883A | 2019-06-24 |
Attorney, Agent or Firm:
MOMII Takafumi (JP)
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