Title:
COMPOSITE SUBSTRATE AND ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/215302
Kind Code:
A1
Abstract:
Provided are a composite substrate with which it is possible to construct an elastic wave device capable of suppressing spurious due to high-order modes, and an elastic wave device having the composite substrate. A composite substrate 2 comprises a support substrate 3 comprising Si, a high acoustic velocity material layer 5, a low acoustic velocity film 6, and a piezoelectric layer 4, wherein at Euler angles (φ, θ, ψ) of Si, φ and θ are in a region indicated by diagonal hatching in FIG. 4. An elastic wave device 1 comprises an IDT electrode 7 provided in contact with the piezoelectric body layer 4 of the composite substrate 2.
Inventors:
IWAMOTO HIDEKI (JP)
Application Number:
PCT/JP2021/015313
Publication Date:
October 28, 2021
Filing Date:
April 13, 2021
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018163842A1 | 2018-09-13 | |||
| WO2017209131A1 | 2017-12-07 | |||
| WO2018215152A1 | 2018-11-29 |
Foreign References:
| JP2012204870A | 2012-10-22 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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