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Title:
COMPOSITE SUBSTRATE FOR ELECTRO-OPTICAL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/235496
Kind Code:
A1
Abstract:
Provided is a composite substrate with which it is possible to realize an electro-optical element of very thin profile, in which: peeling is prominently inhibited; and when configured as an electro-optical element, light propagation loss is reduced, high-speed and low-voltage driving is made possible, and excellent reliability can be maintained even in extreme high-temperature environments. This composite substrate (100) for an electro-optical element according to an embodiment has, in the sequence listed, an electro-optical crystal substrate (10) having an electro-optical effect, a first high-dielectric-constant layer (21), a second high-dielectric-constant layer (22), and a support substrate (30). The first high-dielectric-constant layer (21) and the second high-dielectric-constant layer (22) are directly bonded to each other, and an amorphous layer (40) is formed at the bonding interface between the high-dielectric-constant layer (21) and the second high-dielectric-constant layer (22).

Inventors:
HATTORI RYOSUKE (JP)
TAI TOMOYOSHI (JP)
ASAI KEIICHIRO (JP)
KONDO JUNGO (JP)
Application Number:
PCT/JP2021/019037
Publication Date:
November 25, 2021
Filing Date:
May 19, 2021
Export Citation:
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Assignee:
NGK INSULATORS LTD (JP)
International Classes:
B32B15/04; G02F1/03
Domestic Patent References:
WO2019224908A12019-11-28
WO2014077212A12014-05-22
WO2019071978A12019-04-18
WO2018031916A12018-02-15
Foreign References:
JP2017139720A2017-08-10
JP2010211241A2010-09-24
JP6646187B12020-02-14
US20200013765A12020-01-09
JP2018117030A2018-07-26
JP2012161831A2012-08-30
JP2002040381A2002-02-06
JP2019217530A2019-12-26
Attorney, Agent or Firm:
MOMII Takafumi (JP)
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