Title:
COMPOSITE SUBSTRATE, ELECTRONIC DEVICE, METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/189115
Kind Code:
A1
Abstract:
Provided is a composite substrate that can enhance stability of filter characteristics against temperature change. A composite substrate 1 is a composite substrate that is used for an electronic device. The composite substrate 1 is characterized by being provided with a support substrate 2, and a piezoelectric substrate 3 that is provided on the support substrate 2, wherein the support substrate 2 is formed of crystallized glass obtained by depositing a β-quartz solid solution and/or a β-eucryptite solid solution.
Inventors:
KOBAYASHI MASAHIRO (JP)
OKUNAGA KIYOYUKI (JP)
MASUDA NORIAKI (JP)
OKUNAGA KIYOYUKI (JP)
MASUDA NORIAKI (JP)
Application Number:
PCT/JP2020/005744
Publication Date:
September 24, 2020
Filing Date:
February 14, 2020
Export Citation:
Assignee:
NIPPON ELECTRIC GLASS CO (JP)
International Classes:
H03H3/08; H01L41/053; H01L41/09; H01L41/187; H01L41/313; H01L41/337; H03H9/25
Domestic Patent References:
| WO2016017435A1 | 2016-02-04 |
Foreign References:
| JP2018093329A | 2018-06-14 | |||
| JP2016074598A | 2016-05-12 | |||
| JP2001052334A | 2001-02-23 | |||
| JP2014197845A | 2014-10-16 | |||
| JP2015222970A | 2015-12-10 | |||
| JP2019009641A | 2019-01-17 | |||
| JP2019029941A | 2019-02-21 | |||
| JP2008118576A | 2008-05-22 |
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
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