Title:
COMPOSITE SUBSTRATE AND COMPOSITE SUBSTRATE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/259591
Kind Code:
A1
Abstract:
Provided is a composite substrate in which occurrence of spurious emission is suppressed. The composite substrate according to an embodiment of the present invention has a support substrate, an intermediate layer, and a piezoelectric layer in the stated order. The intermediate layer contains air bubbles. The intermediate layer may contain silicon oxide. The thickness of the intermediate layer may be 500-1000 nm.
Inventors:
HORI YUJI (JP)
Application Number:
PCT/JP2022/000889
Publication Date:
December 15, 2022
Filing Date:
January 13, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
C01B33/113; C01B33/12; H01L21/02; H03H3/08; H03H9/25
Domestic Patent References:
| WO2011158636A1 | 2011-12-22 |
Foreign References:
| JP2017069731A | 2017-04-06 | |||
| JP2018207371A | 2018-12-27 | |||
| JP2004343359A | 2004-12-02 |
Attorney, Agent or Firm:
MOMII Takafumi (JP)
Download PDF: