COMPOSITE SUBSTRATE AND PIEZOELECTRIC ELEMENT

Title:

COMPOSITE SUBSTRATE AND PIEZOELECTRIC ELEMENT

Document Type and Number:

WIPO Patent Application WO/2019/167918

Kind Code:

A1

Abstract:

A composite substrate of the present disclosure is provided with: a piezoelectric substrate having a first surface and a second surface opposing the first surface; a support substrate having a third surface adjoining the second surface and a fourth surface opposing the third surface; and a through-hole penetrating through the first surface and the fourth surface. The through-hole has a tapering shape decreasing in diameter from the first surface toward the fourth surface, and includes a stepped surface at which the diameter decreases in the support substrate. A piezoelectric element of the present disclosure is provided with the composite substrate and an electrical conductor positioned in the through-hole.

Inventors:

NARAHARA YOSHIHIDE (JP)
UMEHARA MOTOHIRO (JP)
KAJIHARA MITSUHIRO (JP)

Application Number:

PCT/JP2019/007206

Publication Date:

September 06, 2019

Filing Date:

February 26, 2019

Export Citation:

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Assignee:

KYOCERA CORP (JP)

International Classes:

H03H9/25

Foreign References:

JP2017169139A	2017-09-21
JP2011223234A	2011-11-04
JP2016201780A	2016-12-01
JPH08186467A	1996-07-16
JP2012142559A	2012-07-26
JP2011130385A	2011-06-30
JP2003037471A	2003-02-07
JP2010050539A	2010-03-04

Other References: