Title:
COMPOSITION FOR FILM FORMATION, INSULATING FILM, AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/010527
Kind Code:
A1
Abstract:
Disclosed is a composition for film formation which includes a polymerizable compound having a polymerizable functional group, wherein the polymerizable compound has, in the molecule, both a partial structure comprising a cage structure of the adamantane type and a polymerizable reactive group that contributes to polymerization reaction. The polymerizable reactive group comprises an aromatic ring and an ethynyl or vinyl group directly bonded to the aromatic ring. In the polymerizable compound, the number of carbon atoms derived from the aromatic ring is 15-38% relative to the number of carbon atoms of the whole polymerizable compound.
Inventors:
NAKAJIMA MICHIO (JP)
SAITO HIDENORI (JP)
HARADA TAKAHIRO (JP)
MATSUTANI MIHOKO (JP)
TADA MASAHIRO (JP)
NAKATANI KOJI (JP)
SAITO HIDENORI (JP)
HARADA TAKAHIRO (JP)
MATSUTANI MIHOKO (JP)
TADA MASAHIRO (JP)
NAKATANI KOJI (JP)
Application Number:
PCT/JP2010/060847
Publication Date:
January 27, 2011
Filing Date:
June 25, 2010
Export Citation:
Assignee:
SUMITOMO BAKELITE CO (JP)
NAKAJIMA MICHIO (JP)
SAITO HIDENORI (JP)
HARADA TAKAHIRO (JP)
MATSUTANI MIHOKO (JP)
TADA MASAHIRO (JP)
NAKATANI KOJI (JP)
NAKAJIMA MICHIO (JP)
SAITO HIDENORI (JP)
HARADA TAKAHIRO (JP)
MATSUTANI MIHOKO (JP)
TADA MASAHIRO (JP)
NAKATANI KOJI (JP)
International Classes:
C08F138/00; C08F136/00; C08L49/00; H01L21/312; H01L21/768; H01L23/522
Foreign References:
| JP2005041938A | 2005-02-17 | |||
| JP2006245458A | 2006-09-14 | |||
| JP2007070597A | 2007-03-22 | |||
| JP2008218632A | 2008-09-18 | |||
| JP2001332543A | 2001-11-30 | |||
| JP2008166572A | 2008-07-17 | |||
| JP2007266099A | 2007-10-11 | |||
| JP2007317817A | 2007-12-06 |
Other References:
JOURNAL OF ORGANIC CHEMISTRY, vol. 39, 1974, pages 2987 - 3003
Attorney, Agent or Firm:
ASAHI Kazuo et al. (JP)
Morning ratio One husband (JP)
Morning ratio One husband (JP)
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