Title:
COMPOSITION FOR FORMING DOPED OR NON-DOPED ZINC OXIDE THIN FILM, AND METHOD FOR PRODUCING ZINC OXIDE THIN FILM USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/123030
Kind Code:
A1
Abstract:
Disclosed is a composition for forming a zinc oxide thin film, which contains an organic zinc compound as a starting material, is not ignitable, and can be easily handled. The composition for forming a zinc oxide thin film is capable of forming a transparent zinc oxide thin film which is not doped or doped with a group 3B element by being heated at 300˚C or less. Also disclosed is a method for obtaining a transparent zinc oxide thin film, which is not doped or doped with a group 3B element, using the composition. Specifically, the composition for forming a zinc oxide thin film contains a product which is obtained by partially hydrolyzing an organic zinc compound by adding water to the organic zinc compound or a solution of the organic zinc compound and a group 3B element compound. In cases when a group 3B element compound is contained, the molar ratio of the group 3B element compound to the organic zinc compound is within the range of 0.005-0.3. The composition is applied to a substrate surface and then heated, thereby forming a zinc oxide thin film which is doped with the group 3B element.
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Inventors:
INABA, Koichiro (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
稲葉 孝一郎 (〒06 山口県周南市開成町４５５５番地 東ソー・ファインケム株式会社内 Yamaguchi, 〒7460006, JP)
TOYOTA, Kouji (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
豊田 浩司 (〒06 山口県周南市開成町４５５５番地 東ソー・ファインケム株式会社内 Yamaguchi, 〒7460006, JP)
稲葉 孝一郎 (〒06 山口県周南市開成町４５５５番地 東ソー・ファインケム株式会社内 Yamaguchi, 〒7460006, JP)
TOYOTA, Kouji (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
豊田 浩司 (〒06 山口県周南市開成町４５５５番地 東ソー・ファインケム株式会社内 Yamaguchi, 〒7460006, JP)
Application Number:
JP2010/057071
Publication Date:
October 28, 2010
Filing Date:
April 21, 2010
Export Citation:
Assignee:
TOSOH FINECHEM CORPORATION (4555 banchi, Kaisei-cho Shunan-cit, Yamaguchi 06, 〒7460006, JP)
東ソー・ファインケム株式会社 (〒06 山口県周南市開成町４５５５番地 Yamaguchi, 〒7460006, JP)
INABA, Koichiro (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
稲葉 孝一郎 (〒06 山口県周南市開成町４５５５番地 東ソー・ファインケム株式会社内 Yamaguchi, 〒7460006, JP)
TOYOTA, Kouji (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
東ソー・ファインケム株式会社 (〒06 山口県周南市開成町４５５５番地 Yamaguchi, 〒7460006, JP)
INABA, Koichiro (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
稲葉 孝一郎 (〒06 山口県周南市開成町４５５５番地 東ソー・ファインケム株式会社内 Yamaguchi, 〒7460006, JP)
TOYOTA, Kouji (4555 banchi Kaisei-cho, Shunan-cit, Yamaguchi 06, 〒7460006, JP)
International Classes:
C01G9/02; H01B13/00
Attorney, Agent or Firm:
SIKs & Co. (8th Floor, Kyobashi-Nisshoku Bldg. 8-7, Kyobashi 1-chome, Chuo-k, Tokyo 31, 〒1040031, JP)
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