Title:
COMPOSITION FOR FORMING FILM FOR LIQUID-IMMERSION EXPOSURE, POLYMER, COMPOUND, AND METHOD FOR FORMING RESIST PATTERN
Document Type and Number:
WIPO Patent Application WO/2013/047044
Kind Code:
A1
Abstract:
The present invention is a composition for forming a film for liquid-immersion exposure, said composition containing the following: a polymer component (A) containing a polymer (a1) that has a constitutional unit (I) represented by diagram (1); and a solvent (B). In diagram (1), R4 and/or R5 is preferably a monovalent organic group containing a fluorine atom. Said monovalent organic group containing a fluorine atom is preferably a group represented by -RE-Rf
, -RE-ORf, or -RE-OCORf, with RE representing a single bond or a divalent linking group and Rf representing a fluorinated alkyl group or a hydroxy fluorinated alkyl group.
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Inventors:
SATO MITSUO (JP)
TANAKA KIYOSHI (JP)
IKEDA NORIHIKO (JP)
KUSABIRAKI KAZUNORI (JP)
HAYAMA TAKAHIRO (JP)
MINEGISHI SHINYA (JP)
TANAKA KIYOSHI (JP)
IKEDA NORIHIKO (JP)
KUSABIRAKI KAZUNORI (JP)
HAYAMA TAKAHIRO (JP)
MINEGISHI SHINYA (JP)
Application Number:
PCT/JP2012/071516
Publication Date:
April 04, 2013
Filing Date:
August 24, 2012
Export Citation:
Assignee:
JSR CORP (JP)
SATO MITSUO (JP)
TANAKA KIYOSHI (JP)
IKEDA NORIHIKO (JP)
KUSABIRAKI KAZUNORI (JP)
HAYAMA TAKAHIRO (JP)
MINEGISHI SHINYA (JP)
SATO MITSUO (JP)
TANAKA KIYOSHI (JP)
IKEDA NORIHIKO (JP)
KUSABIRAKI KAZUNORI (JP)
HAYAMA TAKAHIRO (JP)
MINEGISHI SHINYA (JP)
International Classes:
C08F24/00; C07D307/46; C07D307/94; G03F7/039; H01L21/027
Foreign References:
| JP2006258925A | 2006-09-28 | |||
| JP2006091073A | 2006-04-06 | |||
| JP2006047533A | 2006-02-16 | |||
| US3444148A | 1969-05-13 | |||
| JPS5484564A | 1979-07-05 | |||
| JPH06505022A | 1994-06-09 | |||
| JP2006524251A | 2006-10-26 | |||
| JP2011221513A | 2011-11-04 | |||
| JP2012032806A | 2012-02-16 |
Other References:
TOMOE KITAZUME ET AL.: "Reaction of trifluoroacetaldehyde with some bromoesters", JOURNAL OF FLUORINE CHEMISTRY, vol. 68, 1994, pages 59 - 61
KOUICHI MURATA ET AL.: "Preparation and biologicalevaluation of y-fluoromethyl-alpha-methylene-y-butyrolactone and y-butyrolactam", BIOORGANIC & MEDICINAL CHEMISTRY LETTERS, vol. 3, no. 12, December 1993 (1993-12-01), pages 2685 - 2688, XP026630421, DOI: doi:10.1016/S0960-894X(01)80742-3
HIROSHI FUKUDA ET AL.: "Preparation of alpha-Methylene-y-butyrolactones with Difluoromethylene Functionalities", HETEROCYCLES, vol. 46, 1997, pages 275 - 285
KOUICHI MURATA ET AL.: "Preparation and biologicalevaluation of y-fluoromethyl-alpha-methylene-y-butyrolactone and y-butyrolactam", BIOORGANIC & MEDICINAL CHEMISTRY LETTERS, vol. 3, no. 12, December 1993 (1993-12-01), pages 2685 - 2688, XP026630421, DOI: doi:10.1016/S0960-894X(01)80742-3
HIROSHI FUKUDA ET AL.: "Preparation of alpha-Methylene-y-butyrolactones with Difluoromethylene Functionalities", HETEROCYCLES, vol. 46, 1997, pages 275 - 285
Attorney, Agent or Firm:
AMANO KAZUNORI (JP)
Kazuki Amano (JP)
Kazuki Amano (JP)
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Claims: