Title:
COMPOSITION FOR FORMING FILM, FILM, METHOD FOR FORMING RESIST UNDERLAYER FILM, METHOD FOR MANUFACTURING PATTERNED SUBSTRATE, AND COMPOUND
Document Type and Number:
WIPO Patent Application WO/2017/208796
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide: a composition for forming a film, the composition being capable of forming a film which has excellent flatness as well as excellent solvent resistance, etching resistance, and heat resistance; a film; a method for forming a resist underlayer film; a method for manufacturing a patterned substrate; and a compound. The present invention pertains to a composition which is for forming a film and contains a solvent and a compound having a group represented by formula (1) below. In formula (1), R1-R4 are each independently a hydrogen atom or a monovalent organic group having 1-20 carbon atoms, or exhibit a ring structure having 3-20 ring members, the ring structure being formed along with carbon atoms or carbon chains that are bonded by these groups. Ar1 is a group obtained by removing from an arene, having 6-20 carbon atoms, the hydrogen atoms on (n+3) aromatic rings. R5 is a hydroxy group, a halogen atom, a nitro group, or a monovalent organic group having 1-20 carbon atoms. n is an integer from 0 to 9.
Inventors:
NOSAKA NAOYA (JP)
WAKAMATSU GOUJI (JP)
ABE TSUBASA (JP)
MATSUMURA YUUSHI (JP)
MIYAKE MASAYUKI (JP)
TAKIMOTO YOSHIO (JP)
WAKAMATSU GOUJI (JP)
ABE TSUBASA (JP)
MATSUMURA YUUSHI (JP)
MIYAKE MASAYUKI (JP)
TAKIMOTO YOSHIO (JP)
Application Number:
PCT/JP2017/018222
Publication Date:
December 07, 2017
Filing Date:
May 15, 2017
Export Citation:
Assignee:
JSR CORP (JP)
International Classes:
C08F34/02; G03F7/11; G03F7/26; H01L21/027
Domestic Patent References:
WO2016013598A1 | 2016-01-28 |
Foreign References:
CN103265706A | 2013-08-28 | |||
JPH08295690A | 1996-11-12 |
Other References:
Y.MOREL ET AL.: "Nonlinear absorption spectra of transparent organic crystals for optical limiting applications at visible wavelengths", SYNTHETIC METALS, vol. 115, 2000, pages 265 - 268, XP055600391
Attorney, Agent or Firm:
AMANO Kazunori (JP)
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