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Title:
COMPOSITION FOR FORMING PROTECTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2023/181960
Kind Code:
A1
Abstract:
A polymer including a partial structure represented by formula (1), a partial structure represented by formula (2), and a partial structure represented by formula (3). (In formula (2), Q1 represents a divalent organic group having either an aromatic hydrocarbon ring or an aliphatic hydrocarbon ring.　In formula (3), R11 represents a C1-C10 alkylene group.)

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Inventors:
KAMIBAYASHI SATOSHI (JP)
Application Number:
PCT/JP2023/009020
Publication Date:
September 28, 2023
Filing Date:
March 09, 2023
Export Citation:
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Assignee:
NISSAN CHEMICAL CORP (JP)
International Classes:
C08G59/20; G03F7/11; G03F7/26; G03F7/40; H01L21/027; H01L21/306; H01L21/312
Domestic Patent References:
WO2016208472A12016-12-29
WO2017064992A12017-04-20
WO2020166580A12020-08-20
WO2021111976A12021-06-10
WO2020004122A12020-01-02
Foreign References:
JPS53143698A1978-12-14
JPS5182398A1976-07-19
JPS467331A
JPS58194921A1983-11-14
Attorney, Agent or Firm:
TAKAOKA Ryoichi et al. (JP)
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