Title:
COMPOSITION FOR FORMING ZINC OXIDE THIN FILM, AND METHOD FOR PRODUCING ZINC OXIDE THIN FILM
Document Type and Number:
WIPO Patent Application WO/2019/167669
Kind Code:
A1
Abstract:
The present invention relates to a composition: which contains an organic zinc compound represented by general formula (1) and an organic metal compound wherein the metal element contained in the organic metal compound is a metal element of which an oxide has a band gap smaller than 3.2 eV; and which can be used for the formation of a zinc oxide film by a droplet application method at a substrate temperature of lower than 200°C. The present invention also relates to a method for producing a zinc oxide film, comprising applying the composition in the form of droplets at a substrate temperature of lower than 200°C to form the zinc oxide film. R1-Zn-R1 (1) (wherein R1 represents a linear or branched alkyl group having 1 to 7 carbon atoms.) According to the present invention, it becomes possible to provide a zinc oxide thin film having an ultraviolet ray absorption ability, also having excellent visible light permeability, and also having a thickness of 1 μm or less by a droplet application method such as a spray application method in which the substrate temperature to be employed in a film formation process is lower than 200°C.
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Inventors:
TAKEMOTO YUJIN (JP)
FUTAGOISHI TSUKASA (JP)
AOKI MASAHIRO (JP)
FUTAGOISHI TSUKASA (JP)
AOKI MASAHIRO (JP)
Application Number:
PCT/JP2019/005552
Publication Date:
September 06, 2019
Filing Date:
February 15, 2019
Export Citation:
Assignee:
TOSOH FINECHEM CORP (JP)
International Classes:
G02B5/22; B32B9/00; C01G9/02; C09D1/00; C09D5/32; C09D7/20
Domestic Patent References:
| WO2013161735A1 | 2013-10-31 | |||
| WO2010131621A1 | 2010-11-18 | |||
| WO2015098992A1 | 2015-07-02 | |||
| WO2012053542A1 | 2012-04-26 | |||
| WO2016185939A1 | 2016-11-24 |
Foreign References:
| JP2008105313A | 2008-05-08 | |||
| JP5288464B2 | 2013-09-11 | |||
| JPH07182939A | 1995-07-21 |
Other References:
See also references of EP 3761083A4
Attorney, Agent or Firm:
SIKS & CO. (JP)
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