Title:
COMPOSITION AND MOLDED ARTICLE
Document Type and Number:
WIPO Patent Application WO/2018/030427
Kind Code:
A1
Abstract:
Provided is a composition which has excellent heat resistance and provides a molded article that exhibits a small weight change when exposed to oxygen plasma and fluorine-based plasma in a semiconductor manufacturing process. The composition is characterized by containing a fluorine-containing polymer and a hyper-branched polymer of a cage-type silsesquioxane having a specific structure.
Inventors:
MATSUMOTO KAZUYA (JP)
JIKEI MITSUTOSHI (JP)
YAMAKAWA SUMITO (JP)
SAKURADA TADATAKE (JP)
KAMIYA FUMIHIRO (JP)
NOGUCHI TSUYOSHI (JP)
JIKEI MITSUTOSHI (JP)
YAMAKAWA SUMITO (JP)
SAKURADA TADATAKE (JP)
KAMIYA FUMIHIRO (JP)
NOGUCHI TSUYOSHI (JP)
Application Number:
PCT/JP2017/028820
Publication Date:
February 15, 2018
Filing Date:
August 08, 2017
Export Citation:
Assignee:
UNIV AKITA (JP)
DAIKIN IND LTD (JP)
DAIKIN IND LTD (JP)
International Classes:
C08L27/12; C08L77/00
Domestic Patent References:
| WO2000064980A1 | 2000-11-02 | |||
| WO2004094527A1 | 2004-11-04 | |||
| WO2016133108A1 | 2016-08-25 | |||
| WO2001032782A1 | 2001-05-10 | |||
| WO2004094527A1 | 2004-11-04 | |||
| WO2000064980A1 | 2000-11-02 | |||
| WO1997024381A1 | 1997-07-10 |
Foreign References:
| JPH06302527A | 1994-10-28 | |||
| JPH02219848A | 1990-09-03 | |||
| JPS6157324B2 | 1986-12-06 | |||
| JPH0481608B2 | 1992-12-24 | |||
| JPH0513961B2 | 1993-02-23 | |||
| JPH0259177B2 | 1990-12-11 | |||
| JPH08120146A | 1996-05-14 |
Other References:
KAZUYA MATSUMOTO ET AL.: "Synthesis and properties of aromatic polyamide dendrimers with polyhedral oligomeric silsesquioxane cores", POLYM. CHEM., vol. 6, no. 26, 2015, pages 4758 - 4765, XP055568653
KUNIO NISHI ET AL.: "Kagogata Silsesquioxane o Core to suru Kosedai Hokozoku Polyamide Dendrimer no Gosei to Tokusei Kaiseki", POLYMER PREPRINTS, vol. 63, no. 1, 2014, Japan, pages 287 - 288, XP009505379
KAZUYA MATSUMOTO ET AL.: "Kagogata Silsesquioxane o Core to shita Hokozoku Amide Dendrimer no Gosei", POLYMER PREPRINTS, vol. 62, no. 2, 2013, Japan, pages 2332, XP009515032
KUNIO NISHI ET AL.: "2P174: Synthesis of Amine- Terminated Aromatic Polyamide Dendrimers with Polyhedral Oligomeric Silsesquioxane Cores", INTERNATIONAL SYMPOSIUM FOR THE 70TH ANNIVERSARY OF THE TOHOKU BRANCH OF THE CHEMICAL SOCIETY OF JAPAN; 28-30/09/2013, vol. 25, 28 September 2013 (2013-09-28), JAPAN, pages 384, XP009518703
POLYMER, vol. 44, 2003, pages 4491 - 4499
See also references of EP 3486283A4
KUNIO NISHI ET AL.: "Kagogata Silsesquioxane o Core to suru Kosedai Hokozoku Polyamide Dendrimer no Gosei to Tokusei Kaiseki", POLYMER PREPRINTS, vol. 63, no. 1, 2014, Japan, pages 287 - 288, XP009505379
KAZUYA MATSUMOTO ET AL.: "Kagogata Silsesquioxane o Core to shita Hokozoku Amide Dendrimer no Gosei", POLYMER PREPRINTS, vol. 62, no. 2, 2013, Japan, pages 2332, XP009515032
KUNIO NISHI ET AL.: "2P174: Synthesis of Amine- Terminated Aromatic Polyamide Dendrimers with Polyhedral Oligomeric Silsesquioxane Cores", INTERNATIONAL SYMPOSIUM FOR THE 70TH ANNIVERSARY OF THE TOHOKU BRANCH OF THE CHEMICAL SOCIETY OF JAPAN; 28-30/09/2013, vol. 25, 28 September 2013 (2013-09-28), JAPAN, pages 384, XP009518703
POLYMER, vol. 44, 2003, pages 4491 - 4499
See also references of EP 3486283A4
Attorney, Agent or Firm:
YASUTOMI & ASSOCIATES (JP)
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