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Patent Searching and Data


Title:
COMPOSITION FOR PLASMA PROCESSING DETECTION AND INDICATOR FOR PLASMA PROCESSING DETECTION
Document Type and Number:
WIPO Patent Application WO/2018/008586
Kind Code:
A1
Abstract:
[Problem] To provide a composition for plasma processing detection and an indicator for plasma processing detection, which have high sensitivity. [Solution] A composition for plasma processing detection, which contains one or more first dyes selected from the group consisting of azo, anthraquinone, methine and xanthene and a discoloration accelerator that accelerates discoloration of the first dyes in a plasma processing atmosphere. This composition for plasma processing detection is characterized in that: the discoloration accelerator contains one or more compounds represented by a chemical structural formula that comprises a chemical structure wherein two benzene rings are linked by a single bond or a linking group; and the linking group links the two benzene rings by having two or three single bonds connected in series.

Inventors:
SAKUMURA Takeshi (6-20 Morinomiya Chuo 1-chome, chuo-k, Osaka-shi Osaka 08, 〒5408508, JP)
Application Number:
JP2017/024314
Publication Date:
January 11, 2018
Filing Date:
July 03, 2017
Export Citation:
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Assignee:
SAKURA COLOR PRODUCTS CORPORATION (10-17, Nakamichi 1-chome Higashinari-ku, Osaka-sh, Osaka 25, 〒5370025, JP)
International Classes:
G01N31/22; C09D11/037; H01L21/3065
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