Title:
COMPOUND, PRODUCTION METHOD THEREFOR, COMPOSITION, RESIST FILM, AND PATTERN FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2021/230185
Kind Code:
A1
Abstract:
Provided is a compound in which the hydroxy groups of a polyphenol are crosslinked within each molecule by a group containing a degradable bond that is degraded under acidic or alkaline conditions. The polyphenol is preferably a calixarene.
Inventors:
KUDO HIROTO (JP)
SATO TAKASHI (JP)
OMATSU TADASHI (JP)
ECHIGO MASATOSHI (JP)
SATO TAKASHI (JP)
OMATSU TADASHI (JP)
ECHIGO MASATOSHI (JP)
Application Number:
PCT/JP2021/017657
Publication Date:
November 18, 2021
Filing Date:
May 10, 2021
Export Citation:
Assignee:
THE SCHOOL CORPORATION KANSAI UNIV (JP)
MITSUBISHI GAS CHEMICAL CO (JP)
MITSUBISHI GAS CHEMICAL CO (JP)
International Classes:
C07D323/00; C08G16/04; C08L33/06; G03F7/004; G03F7/039; G03F7/11; G03F7/20
Domestic Patent References:
| WO2012014435A1 | 2012-02-02 |
Foreign References:
| JP2017088847A | 2017-05-25 | |||
| JP2009046395A | 2009-03-05 |
Other References:
ZHENG, Q. ET AL.: "Synthesis of New Chromogenic Calix[4]crowns and Molecular Recognition of Alkylamines", TETRAHEDRON, vol. 53, no. 30, 1997, pages 10345 - 10356, XP004105922, DOI: 10.1016/S0040-4020(97)00653-4
ZHONG, Z. ET AL.: "Synthesis of ester group-containing p-tert- butylcalixcrowns", SYNTHETIC COMMUNICATIONS, vol. 26, no. 2, 1996, pages 307 - 313, DOI: 10.1080/00397919608003619
YANG, F. ET AL.: "Regioselective Bridging of Calixarenes - Syntheses, Structural Elucidation and Extraction Studies of 1,2-Calix[n]dioxocrowns (n = 6, 8", EUROPEAN JOURNAL OF ORGANIC CHEMISTRY, 2001, pages 365 - 368, DOI: 10.1002/1099-0690(200101)2001:2<365::AID-EJOC365>3.0.CO
VAN LOON, J. ET AL.: "Calix[4]arenes Bridged at the Lower Rim", JOURNAL OF ORGANIC CHEMISTRY, vol. 55, no. 17, 1990, pages 5176 - 5179, DOI: 10.1021/jo00304a037
GUTSCHE, C. D. ET AL.: "Calixarenes. 27. Synthesis, Characterization, and Complexation Studies of Double-Cavity Calix[4]arenes", JOURNAL OF ORGANIC CHEMISTRY, vol. 57, no. 1 6, 1992, pages 4527 - 4539, DOI: 10.1021/jo00042a038
DOI: 10.2116
SUGIOKA, T. ET AL.: "Synthesis of Fully Lower-Rim, Carbonate-Bridged Calix[8]arenes and Their Curing Behavior", JOURNAL OF POLYMER SCIENCE, vol. 39, no. 8, 2001, pages 1149 - 1155, DOI: 10.1002/pola.1091
vol. 26, no. 2, 2005, pages 98 - 110
MAEKAWA, H. ET AL.: "Higher Sensitive Extreme Ultraviolet (EUV) Resist Materials Derived From p-t-Butylcalix[n]arenes (n = 4 and 8", JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, vol. 33, no. 1, 2020, pages 45 - 51
ZHONG, Z. ET AL.: "Synthesis of ester group-containing p-tert- butylcalixcrowns", SYNTHETIC COMMUNICATIONS, vol. 26, no. 2, 1996, pages 307 - 313, DOI: 10.1080/00397919608003619
YANG, F. ET AL.: "Regioselective Bridging of Calixarenes - Syntheses, Structural Elucidation and Extraction Studies of 1,2-Calix[n]dioxocrowns (n = 6, 8", EUROPEAN JOURNAL OF ORGANIC CHEMISTRY, 2001, pages 365 - 368, DOI: 10.1002/1099-0690(200101)2001:2<365::AID-EJOC365>3.0.CO
VAN LOON, J. ET AL.: "Calix[4]arenes Bridged at the Lower Rim", JOURNAL OF ORGANIC CHEMISTRY, vol. 55, no. 17, 1990, pages 5176 - 5179, DOI: 10.1021/jo00304a037
GUTSCHE, C. D. ET AL.: "Calixarenes. 27. Synthesis, Characterization, and Complexation Studies of Double-Cavity Calix[4]arenes", JOURNAL OF ORGANIC CHEMISTRY, vol. 57, no. 1 6, 1992, pages 4527 - 4539, DOI: 10.1021/jo00042a038
DOI: 10.2116
SUGIOKA, T. ET AL.: "Synthesis of Fully Lower-Rim, Carbonate-Bridged Calix[8]arenes and Their Curing Behavior", JOURNAL OF POLYMER SCIENCE, vol. 39, no. 8, 2001, pages 1149 - 1155, DOI: 10.1002/pola.1091
vol. 26, no. 2, 2005, pages 98 - 110
MAEKAWA, H. ET AL.: "Higher Sensitive Extreme Ultraviolet (EUV) Resist Materials Derived From p-t-Butylcalix[n]arenes (n = 4 and 8", JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, vol. 33, no. 1, 2020, pages 45 - 51
Attorney, Agent or Firm:
YAMAMOTO, Osamu et al. (JP)
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