Title:
COMPOUND SENSOR
Document Type and Number:
WIPO Patent Application WO/2015/001813
Kind Code:
A1
Abstract:
Pressure inside a sensor for sensing physical values does not readily stabilize due to small amounts of generated gas or gas generated during joining in a small sensor manufactured by the MEMS process. An acceleration sensor oscillator (8) may ride up onto a fixed part when the top and bottom caps of the device layer of the acceleration sensor oscillator are larger than the thickness thereof. Accordingly, in a compound sensor capable of sensing acceleration and angular speed, the acceleration sensor oscillator (8) is prevented from riding up on the fixed part by a structure in which gaps (G1, G2) formed above and below the oscillator moving part (8) of the acceleration sensor (6a) are formed to be smaller than the thickness (T2) of the oscillator moving part (8) of the acceleration sensor (6a). Pressure variability due to small amounts of generated gas can be reduced by a structure in which at least one of gaps (D1, D2) above and below the oscillator moving part (8) of the angular speed sensor (5a) is formed to be larger than the thickness of the oscillator moving part (8) of the acceleration sensor (6a).
Inventors:
KANAMARU MASATOSHI (JP)
HAYASHI MASAHIDE (JP)
AONO TAKANORI (JP)
JEONG HEEWON (JP)
YURA MASASHI (JP)
YAMANAKA KIYOKO (JP)
HAYASHI MASAHIDE (JP)
AONO TAKANORI (JP)
JEONG HEEWON (JP)
YURA MASASHI (JP)
YAMANAKA KIYOKO (JP)
Application Number:
PCT/JP2014/052828
Publication Date:
January 08, 2015
Filing Date:
February 07, 2014
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
International Classes:
G01C19/5733; B81B3/00; G01C19/5769; G01P15/08; G01P15/125; H01L29/84
Foreign References:
| JP2012154802A | 2012-08-16 | |||
| JP2006084327A | 2006-03-30 | |||
| JP2011242371A | 2011-12-01 | |||
| JP2010153406A | 2010-07-08 | |||
| JP2010107325A | 2010-05-13 | |||
| US20090282917A1 | 2009-11-19 | |||
| JP2012088319A | 2012-05-10 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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