Title:
COMPUTING DEVICE AND COMPUTATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/064625
Kind Code:
A1
Abstract:
Provided is a computing device which, when one of a substrate and a mask has four marks arranged to be positioned at the apexes of a rectangle, wherein a line connecting a first mark and a second mark among the four marks and a line connecting a third mark and a fourth mark among the four marks are orthogonal to each other, the other of the substrate and the mask having a fifth mark, uses imaging data of the substrate and the mask superimposed upon each other in which the five marks are exposed and the fifth mark is positioned at the center of the four marks to compute an inclination of an image based on the imaging data on the basis of the first mark and the second mark or the third mark and the fourth mark, and computes the amount of positional deviation between the center of the four marks and the fifth mark on the basis of a distance per unit pixel in a direction in which the first mark and the second mark are arranged side by side and a distance per unit pixel in a direction in which the third mark and the fourth mark are arranged side by side.
Inventors:
TORII ATSUSHI (JP)
Application Number:
PCT/JP2020/036176
Publication Date:
March 31, 2022
Filing Date:
September 25, 2020
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
B41F15/26; B41F15/08
Domestic Patent References:
| WO2009122529A1 | 2009-10-08 | |||
| WO2008113825A2 | 2008-09-25 |
Foreign References:
| JP2003191432A | 2003-07-08 | |||
| JP2009115622A | 2009-05-28 | |||
| JP2020034619A | 2020-03-05 |
Attorney, Agent or Firm:
NEXT INTERNATIONAL et al. (JP)
Download PDF: