Title:
CONCENTRATION MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/203281
Kind Code:
A1
Abstract:
A concentration measurement device 20, for measuring the concentration of a gas flowing through a confluence block 14 to which a plurality of gas supply lines are connected, is provided with a light source 40 for generating light which is made incident on a flow channel formed in the confluence block, a photodetector 44 for receiving light exciting from the flow channel, and a computation control circuit 46 for determining the concentration of a gas flowing through the flow channel on the basis of the output of the photodetector, translucent incidence windows 26, 23 for causing light from the light source to be incident on the flow channel, and/or translucent emission windows 28, 23 for emitting light transmitted through the flow channel being sealed and fixed to the confluence block 14.
Inventors:
NAGASE MASAAKI (JP)
HASEGAWA KEIICHI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
HASEGAWA KEIICHI (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2020/011902
Publication Date:
October 08, 2020
Filing Date:
March 18, 2020
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G01N21/03; G01N21/33; H01L21/02
Domestic Patent References:
| WO2017029792A1 | 2017-02-23 | |||
| WO2008074142A1 | 2008-06-26 |
Foreign References:
| JPH05132393A | 1993-05-28 | |||
| JP2011196832A | 2011-10-06 | |||
| JP2018017644A | 2018-02-01 | |||
| JP2017211357A | 2017-11-30 | |||
| JP2012173022A | 2012-09-10 | |||
| JPH08153685A | 1996-06-11 |
Attorney, Agent or Firm:
TANIDA Ryuichi et al. (JP)
Download PDF:
Previous Patent: WASTE HEAT RECOVERY SYSTEM
Next Patent: ANALYZING DEVICE, ANALYZING METHOD, AND ANALYZING PROGRAM
Next Patent: ANALYZING DEVICE, ANALYZING METHOD, AND ANALYZING PROGRAM