Title:
CONCRETE VACUUM CHAMBER
Document Type and Number:
WIPO Patent Application WO/2010/014553
Kind Code:
A3
Abstract:
The present invention embodies processing systems and vacuum chambers equipped to process substrates for flat panel displays, solar cells, or other electronic devices. The processing system and/or the vacuum chambers as well as their components and supporting structure are constructed of less costly materials and in a more energy efficient manner than that of current large area substrate processing systems. In one embodiment, the processing system chamber bodies and their supporting structures are constructed of reinforced concrete. In one embodiment, system processing chambers include a vacuum tight lining disposed inside reinforced concrete chamber bodies.
Inventors:
POLYAK ALEXANDER S (US)
CHO TOM K (US)
YUDOVSKY JOSEPH (US)
VESCI ANTHONY (US)
CHO TOM K (US)
YUDOVSKY JOSEPH (US)
VESCI ANTHONY (US)
Application Number:
PCT/US2009/051860
Publication Date:
April 01, 2010
Filing Date:
July 27, 2009
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
POLYAK ALEXANDER S (US)
CHO TOM K (US)
YUDOVSKY JOSEPH (US)
VESCI ANTHONY (US)
POLYAK ALEXANDER S (US)
CHO TOM K (US)
YUDOVSKY JOSEPH (US)
VESCI ANTHONY (US)
International Classes:
H01L21/00; H01L21/02; H01L21/203; H01L21/205; H01L21/265; H01L21/3065
Foreign References:
| US20050092251A1 | 2005-05-05 | |||
| US20050005850A1 | 2005-01-13 | |||
| US5498290A | 1996-03-12 | |||
| US20070172015A1 | 2007-07-26 |
Attorney, Agent or Firm:
PATTERSON, B., Todd et al. (L.L.P.3040 Post Oak Blvd., Suite 150, Houston TX, US)
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