Title:
CONDENSATE WATER SEPARATION DEVICE AND SEMICONDUCTOR PROCESS DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/226929
Kind Code:
A1
Abstract:
A condensate water separation device, which is used for a gas emission system of a semiconductor process device. The gas emission system comprises an exhaust pipeline; a pressure control valve group (5) is provided on the exhaust pipeline. The condensate water separation device comprises: a device body (1), internally provided with a broken line-shaped gas channel, the gas channel comprising a plurality of channels which are sequentially communicated in a gas flowing direction, a gas inlet end (A1) of the most upstream channel (1a) serving as a gas inlet and being adapted to be connected to an outlet end of the pressure control valve group (5), a gas outlet end (A4) of the most downstream channel (1d) serving as a gas outlet and being higher than the gas inlet end of the channel, and the gas outlet end of at least one of the remaining channels being lower than the gas inlet end; and an one-way liquid discharge structure (7), connected at a joint between the channel having the gas outlet end lower than the gas inlet end and a downstream channel, and used for discharging condensate water which flows through. The semiconductor process device comprises a reaction chamber (34) and the gas emission system. The gas emission system comprises: the exhaust pipeline connected to the reaction chamber (34); the pressure control valve group (5) arranged on the exhaust pipeline; and the condensate water separation device, a gas inlet of the condensate water separation device being connected to an outlet end of the pressure control valve group (5).
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Inventors:
GUANG YAOHUA (CN)
SHI LEI (CN)
WANG LIKA (CN)
SHI LEI (CN)
WANG LIKA (CN)
Application Number:
PCT/CN2023/095512
Publication Date:
November 30, 2023
Filing Date:
May 22, 2023
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
B01D45/06; B01D53/00; H01L21/67
Foreign References:
| CN114733270A | 2022-07-12 | |||
| CN211752618U | 2020-10-27 | |||
| CN113760020A | 2021-12-07 | |||
| CN207034282U | 2018-02-23 | |||
| CN204307505U | 2015-05-06 | |||
| CN208554193U | 2019-03-01 | |||
| JP2010120762A | 2010-06-03 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPER TY ATTORNEYS (CN)
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