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Title:
CONDENSER AND SEMICONDUCTOR PROCESSING MACHINE
Document Type and Number:
WIPO Patent Application WO/2022/068299
Kind Code:
A1
Abstract:
A condenser and a semiconductor processing machine, relating to the technical field of semiconductor devices. A condenser (100) comprises a sealed chamber. An airflow channel is provided inside the sealed chamber, and a cooling liquid is filled around the airflow channel. An air inlet (110), an air outlet (120), and a liquid discharge port (130) are disposed on the sealed chamber. The air inlet (110) communicates with an inlet of the airflow channel, the air outlet (120) communicates with an outlet of the airflow channel, and the liquid discharge port (130) communicates with the airflow channel. The airflow channel is a channel having a Tesla valve structure. The above configuration can increase the contact area between gas and the cooling liquid, thereby improving the condensation performance of the condenser.

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Inventors:
LI TIANLONG (CN)
Application Number:
PCT/CN2021/103674
Publication Date:
April 07, 2022
Filing Date:
June 30, 2021
Export Citation:
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Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
F28B1/02; F28F13/12; H01L27/00
Foreign References:
CN203687669U2014-07-02
CN104253065A2014-12-31
DE102018010103A12019-07-18
CN111359354A2020-07-03
CN111355343A2020-06-30
US20180259130A12018-09-13
CN209558961U2019-10-29
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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