Title:
CONDENSER SYSTEM FOR HIGH PRESSURE PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/099255
Kind Code:
A3
Abstract:
Embodiments described herein relate to a high pressure processing system with a condenser and methods for utilizing the same. The processing system includes a process chamber, a boiler, a condenser, and one or more heat exchangers. The boiler generates a fluid, such as a vapor or supercritical fluid, and delivers the fluid to the process chamber where a substrate is processed. After processing the substrate, the system is depressurized and the fluid is delivered to the condenser where the fluid is condensed.
Inventors:
DELMAS JEAN (US)
Application Number:
PCT/US2018/059676
Publication Date:
July 11, 2019
Filing Date:
November 07, 2018
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
B01J3/00
Foreign References:
| US20120048304A1 | 2012-03-01 | |||
| US20120060868A1 | 2012-03-15 | |||
| US20050198971A1 | 2005-09-15 | |||
| US20150292736A1 | 2015-10-15 | |||
| US7361231B2 | 2008-04-22 |
Attorney, Agent or Firm:
PATTERSON, B. Todd et al. (US)
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