Title:
CONDITIONER, CHEMICAL-MECHANICAL POLISHING DEVICE, AND DETECTION METHOD OF CONDITIONER
Document Type and Number:
WIPO Patent Application WO/2023/284233
Kind Code:
A1
Abstract:
A conditioner, a chemical-mechanical polishing device, and a detection method of a conditioner. The conditioner comprises a polishing portion (1) and a driving portion (2), wherein the polishing portion (1) is mounted on the driving portion (2); and an airflow passage (22) is arranged in the driving portion (2), one end of the airflow passage (22) is connected to a negative pressure generation device (4), and the other end thereof is connected to the polishing portion (1), so as to be used to form negative pressure on the surface of the polishing portion (1) that is connected to the driving portion (2), such that the polishing portion (1) is sucked to the driving portion (2); and the conditioner further comprises a pressure measuring unit (5), the pressure measuring unit (5) being configured to measure pressure in the airflow passage (22).
Inventors:
TANG CHAO (CN)
Application Number:
PCT/CN2021/135735
Publication Date:
January 19, 2023
Filing Date:
December 06, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B24B37/00; B24B37/005; B24B37/34; G01L11/00
Foreign References:
| CN113524016A | 2021-10-22 | |||
| US20060052037A1 | 2006-03-09 | |||
| CN104290030A | 2015-01-21 | |||
| JP2018114586A | 2018-07-26 | |||
| JP2003260638A | 2003-09-16 | |||
| CN107471113A | 2017-12-15 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
Download PDF:
Previous Patent: PATH ADDRESSING METHOD AND NETWORK SERVICE SYSTEM
Next Patent: PPG SENSOR, PHYSIOLOGICAL PARAMETER SENSOR, AND SMART WEARABLE DEVICE
Next Patent: PPG SENSOR, PHYSIOLOGICAL PARAMETER SENSOR, AND SMART WEARABLE DEVICE