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Patent Searching and Data


Title:
CONDUCTIVE FILM, METHOD FOR PRODUCING SAME, CONDUCTOR, RESIST PATTERN FORMATION METHOD, AND LAMINATE
Document Type and Number:
WIPO Patent Application WO/2019/177096
Kind Code:
A1
Abstract:
This conductive film comprises a conductive polymer (A), and has a film thickness of 35 nm or less. The surface resistance of the conductive film is 1×1011Ω/□ or less, and the standard deviation of the value of current flowing in the conductive film when a voltage is applied to the conductive film is 5 or less. The conductor according to the present invention comprises a base material and the conductive film provided on at least a portion of the surface of the base material. The resist pattern formation method according to the present invention comprises: a lamination step for forming the conductive film on the surface of a resist layer of a substrate having on one surface said resist layer comprising a chemically amplified resist material; and an exposure step for irradiating the substrate with an electron beam in a pattern shape from the conductive film side. The laminate according to the present invention comprises a resist layer and an antistatic film formed on the surface of the resist layer, and the antistatic film is the conductive film.

Inventors:
MAKIGAWA Saki (1-1 Marunouchi 1-chome, Chiyoda-k, Tokyo 51, 〒1008251, JP)
YAMAZAKI Akira (1-1 Marunouchi 1-chome, Chiyoda-k, Tokyo 51, 〒1008251, JP)
YAMADA Naoko (1-1 Marunouchi 1-chome, Chiyoda-k, Tokyo 51, 〒1008251, JP)
IRIE Yoshiko (1-1 Marunouchi 1-chome, Chiyoda-k, Tokyo 51, 〒1008251, JP)
SAIKI Shinji (1-1 Marunouchi 1-chome, Chiyoda-k, Tokyo 51, 〒1008251, JP)
UZAWA Masashi (1-1 Marunouchi 1-chome, Chiyoda-k, Tokyo 51, 〒1008251, JP)
Application Number:
JP2019/010536
Publication Date:
September 19, 2019
Filing Date:
March 14, 2019
Export Citation:
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Assignee:
MITSUBISHI CHEMICAL CORPORATION (1-1 Marunouchi 1-chome, Chiyoda-ku Tokyo, 51, 〒1008251, JP)
International Classes:
H01B1/12; C08G73/00; G03F7/11; G03F7/20; H01B5/14; H01B13/00; H01L21/027
Attorney, Agent or Firm:
TAZAKI Akira et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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