Title:
CONDUCTIVE STRUCTURE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/153318
Kind Code:
A1
Abstract:
The present invention relates to a conductive structure and a manufacturing method therefor, the conductive structure comprising: a substrate; and a conductive line forming a screen part, a wiring part and a pad part arranged on the substrate, wherein the conductive line comprises a metal layer, a first anti-reflection layer arranged on the metal layer, and a second anti-reflection layer arranged on the first anti-reflection layer, and the first anti-reflection layer and the second anti-reflection layer include aluminium oxynitride. In addition, the element content of a nitrogen atom of the second anti-reflection layer is characterised in that the element content is smaller than the element content of the nitrogen atom of the first anti-reflection layer.
Inventors:
LEE ILHA (KR)
KIM KI-HWAN (KR)
JANG SONG HO (KR)
PARK JIN WOO (KR)
PARK CHAN HYOUNG (KR)
KIM KI-HWAN (KR)
JANG SONG HO (KR)
PARK JIN WOO (KR)
PARK CHAN HYOUNG (KR)
Application Number:
PCT/KR2016/003076
Publication Date:
September 29, 2016
Filing Date:
March 25, 2016
Export Citation:
Assignee:
LG CHEMICAL LTD (KR)
International Classes:
G06F3/041; G02B1/10; H01B5/00; H01B5/14
Domestic Patent References:
| WO2012121518A2 | 2012-09-13 |
Foreign References:
| KR20140046944A | 2014-04-21 | |||
| KR20140030075A | 2014-03-11 | |||
| KR20140010262A | 2014-01-24 | |||
| KR20140014843A | 2014-02-06 |
Attorney, Agent or Firm:
CHUNG, Soon-Sung (KR)
정순성 (KR)
정순성 (KR)
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