Title:
CONFOCAL DISPLACEMENT METER
Document Type and Number:
WIPO Patent Application WO/2017/110837
Kind Code:
A1
Abstract:
[Problem] To provide a confocal displacement meter capable of reducing measurement error. [Solution] Light of a plurality of wavelengths is emitted by a light projection unit (120). A lens unit (220) is used to generate, in the light emitted by the light projection unit (120), chromatic aberration along the optical axis direction. Furthermore, the light having chromatic aberration is made to converge by the lens unit (220), and a measurement object (S) is irradiated therewith. Light of wavelengths reflected by the surface of the measurement object (S) while focusing, among the light with which the measurement object (S) is irradiated via the lens unit (220), passes through a plurality of pin holes. Displacement of the measurement object (S) is calculated by a calculation processing unit (150), on the basis of the signal intensity of each wavelength of an average signal corresponding to the average intensity of each wavelength of the plurality of rays of light which have passed through the plurality of pin holes.
Inventors:
KUGA SHOMA (JP)
Application Number:
PCT/JP2016/088008
Publication Date:
June 29, 2017
Filing Date:
December 21, 2016
Export Citation:
Assignee:
KEYENCE CO LTD (JP)
International Classes:
G01B11/00
Foreign References:
| JP2014178287A | 2014-09-25 | |||
| JP2011017552A | 2011-01-27 | |||
| JP2004286598A | 2004-10-14 | |||
| JPS62144014A | 1987-06-27 |
Other References:
See also references of EP 3396308A4
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