Title:
CONFOCAL MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/114959
Kind Code:
A1
Abstract:
The present invention is a confocal measurement device for measuring the displacement of a measurement subject (200) using a confocal optical system. The confocal measurement device is provided with: a light source for emitting light having a plurality of wavelengths; a diffractive lens (1) for generating a chromatic aberration along the optical axis direction in the light emitted from the light source; and a measurement unit for measuring, for each wavelength, the intensity of light focused on the measurement subject (200) from amongst the light in which the diffractive lens (1) has generated a chromatic aberration. Furthermore, the confocal measurement device is configured so that the principal light beam (11b) from the light source to the diffractive lens (1) is displaced from the optical axis (1a) of the diffractive lens (1).
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Inventors:
HAYAKAWA MASAYUKI (JP)
YAMASHITA YOSHIHIRO (JP)
YAMASHITA YOSHIHIRO (JP)
Application Number:
PCT/JP2013/050769
Publication Date:
August 08, 2013
Filing Date:
January 17, 2013
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO (JP)
International Classes:
G01C3/06; G01B11/00
Foreign References:
| JP2008241712A | 2008-10-09 | |||
| JP2007147299A | 2007-06-14 | |||
| US5785851A | 1998-07-28 | |||
| JP2004126394A | 2004-04-22 | |||
| JP2011170028A | 2011-09-01 | |||
| US5785651A | 1998-07-28 |
Other References:
See also references of EP 2811259A4
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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Claims: