Title:
CONFOCAL MICROSCOPIC DEVICE
Document Type and Number:
WIPO Patent Application WO1998044375
Kind Code:
A3
Abstract:
An autofocus for a confocal microscope is realized by means of a confocal microscope arrangement comprising an illumination arrangement for illuminating an object in a raster pattern, first means for generating a first wavelength-selective splitting of the illumination light and second means for generating a second wavelength-selective splitting of the light coming from the object in a parallel manner for a plurality of points of the object, and detection means for detecting the light distribution generated by the second means, wherein an at least point-by-point spectral splitting and detection of an object image in a wavelength-selective manner is carried out and a control signal is generated from the determination of the frequency deviation and/or intensity deviation from a predetermined reference value corresponding to the object position in order to adjust the focal position by means of the vertical object position and/or the imaging system of the microscope. Further, a process is realized for determining deviations of at least a first height profile from at least one simultaneously or previously detected second height profile, preferably for detecting and/or monitoring defects in semiconductor structures, wherein a first object is illuminated in a wavelength-selective manner by a light source and the light originating from the first object is detected and is compared electronically with a previously or simultaneously detected second object.
Inventors:
SCHERUEBL THOMAS (DE)
CZARNETZKI NORBERT (DE)
CZARNETZKI NORBERT (DE)
Application Number:
PCT/EP1998/001177
Publication Date:
March 04, 1999
Filing Date:
March 03, 1998
Export Citation:
Assignee:
ZEISS CARL JENA GMBH (DE)
SCHERUEBL THOMAS (DE)
CZARNETZKI NORBERT (DE)
SCHERUEBL THOMAS (DE)
CZARNETZKI NORBERT (DE)
International Classes:
G01B11/02; G02B21/00; (IPC1-7): G02B21/00; G01B9/04; G01B11/02; G01B11/24
Domestic Patent References:
| WO1995000871A1 | 1995-01-05 |
Foreign References:
| EP0327425A1 | 1989-08-09 | |||
| FR2716727A1 | 1995-09-01 | |||
| DE4419940A1 | 1995-12-14 | |||
| EP0466979A1 | 1992-01-22 | |||
| DE4100478A1 | 1992-07-09 | |||
| EP0142464A1 | 1985-05-22 | |||
| US4725721A | 1988-02-16 | |||
| US4600831A | 1986-07-15 | |||
| EP0470942A1 | 1992-02-12 | |||
| US5313265A | 1994-05-17 |
Other References:
1997, MELLES GRIOT, CATALOGUE, XP002081986
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