Title:
CONNECTED CONVEYANCE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/155356
Kind Code:
A1
Abstract:
In conventional conveyance systems for wafers, etc., the connection between a container and a front chamber was formed by a complicated mechanism, because the front chamber was provided beforehand on a device and an object to be conveyed was conveyed from the container to a device region by passing the object to be conveyed through the front chamber. Disclosed is a connected system wherein: a conveyance container (7) has a tightly connectable seal structure for a conveyance container body (11) and a conveyance container door (12); a device (8) has a tightly connectable seal structure for a device main body (13) and a device door (9); the conveyance container and the device both have tightly connectable seal structures; an air-tight connecting chamber is formed only when the conveyance container and the device are tightly connected; the structure is such that the conveyance container door is separated from the conveyance container and taken inside the device; the conveyance container main body and the conveyance container door have a magnet and/or a magnetic body (28, 27) and form the conveyance container that has a structure whereby the conveyance container door and the conveyance container are closed by the magnetic force between said magnet and/or magnetic body; and the device has the device main body and the device door that has a magnet (26).
Inventors:
HARA Shiro (Tsukuba Central 2 1-1, Umezono 1-chome, Tsukuba-sh, Ibaraki 68, 〒3058568, JP)
原 史朗 (〒68 茨城県つくば市梅園１－１－１ 中央第２ 独立行政法人産業技術総合研究所内 Ibaraki, 〒3058568, JP)
原 史朗 (〒68 茨城県つくば市梅園１－１－１ 中央第２ 独立行政法人産業技術総合研究所内 Ibaraki, 〒3058568, JP)
Application Number:
JP2011/062332
Publication Date:
December 15, 2011
Filing Date:
May 30, 2011
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology (3-1 Kasumigaseki 1-chome, Chiyoda-ku Tokyo, 21, 〒1008921, JP)
独立行政法人産業技術総合研究所 (〒21 東京都千代田区霞が関１丁目３番１号 Tokyo, 〒1008921, JP)
HARA Shiro (Tsukuba Central 2 1-1, Umezono 1-chome, Tsukuba-sh, Ibaraki 68, 〒3058568, JP)
独立行政法人産業技術総合研究所 (〒21 東京都千代田区霞が関１丁目３番１号 Tokyo, 〒1008921, JP)
HARA Shiro (Tsukuba Central 2 1-1, Umezono 1-chome, Tsukuba-sh, Ibaraki 68, 〒3058568, JP)
International Classes:
H01L21/673; B65D45/02; B65D85/86
Attorney, Agent or Firm:
HASEBE Zentaro et al. (Enju-Ochanomizu Bldg. 3F, 2-17-2 Sotokanda, Chiyoda-k, Tokyo 21, 〒1010021, JP)
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Claims:
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