Title:
CONNECTION DEVICE FOR INSPECTION
Document Type and Number:
WIPO Patent Application WO/2020/213435
Kind Code:
A1
Abstract:
The present invention provides a connection device for inspection including: a probe head (30) that holds an electrical connector (10) and an optical connector (20) with the respective tip portions being exposed from a lower surface of the probe head (30), the base end portion of the electrical connector (10) being exposed from an upper surface of the probe head (30), the optical connector (20) being fixed onto the upper surface; and a transformer (40) that has a connection wire (41) disposed inside the transformer (40), one end of the connection wire (41) being electrically connected to the base end portion of the electrical connector (10) exposed from the upper surface of the probe head (30), the one end being disposed on a lower surface of the transformer (40), the optical connector (20) slidably penetrating the transformer (40). A positional relationship between the tip portion of the electric connector (10) and the tip portion of the optical connector (20) on the lower surface of the probe head (30) corresponds to a positional relationship between an electric signal terminal and an optical signal terminal of a semiconductor element. The optical connector (20) continuously penetrates the probe head (30) and the transformer (40).
Inventors:
SATO MINORU (JP)
Application Number:
PCT/JP2020/015332
Publication Date:
October 22, 2020
Filing Date:
April 03, 2020
Export Citation:
Assignee:
NIHON MICRONICS KK (JP)
International Classes:
H01L21/66; G01R1/067; G01R1/073; G01R31/26
Domestic Patent References:
| WO2004072661A1 | 2004-08-26 |
Foreign References:
| US20060109015A1 | 2006-05-25 | |||
| US6657446B1 | 2003-12-02 | |||
| JP2019035694A | 2019-03-07 | |||
| JP2018081948A | 2018-05-24 | |||
| JPH01170857A | 1989-07-05 | |||
| JP2009300333A | 2009-12-24 |
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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