Title:
CONTACT CONDUCTION JIG AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/208690
Kind Code:
A1
Abstract:
[Problem] To provide a contact conduction jig and an inspection device which easily improve the ability to absorb variations in height of an object to be in contact with. [Solution] An inspection jig 3 is provided with: a support plate 31 that is a plate-like member and has formed therein a plurality of through-holes H penetrating through the member in the thickness direction; probes Pr that are respectively inserted into the plurality of through-holes (H) and have a tubular shape and a conductive property; and elastomers E that elastically hold the probes Pr inside the through-holes H. Each of the probes Pr has a helical first spring part SO1 that extends and contracts in the axial direction of the corresponding probe Pr and that has a winding direction in a first direction.
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Inventors:
NUMATA KIYOSHI (JP)
Application Number:
PCT/JP2017/016548
Publication Date:
December 07, 2017
Filing Date:
April 26, 2017
Export Citation:
Assignee:
NIDEC-READ CORP (JP)
International Classes:
G01R1/067; G01R1/073; G01R31/26; H01L21/66; H01R33/76
Domestic Patent References:
| WO2011115082A1 | 2011-09-22 |
Foreign References:
| JP3059385U | 1999-07-09 | |||
| JP2007064934A | 2007-03-15 | |||
| US7491069B1 | 2009-02-17 |
Attorney, Agent or Firm:
YANAGINO Takao et al. (JP)
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