Title:
CONTACT PROBE
Document Type and Number:
WIPO Patent Application WO/2011/142366
Kind Code:
A1
Abstract:
Disclosed is a contact probe wherein low adhesiveness to a device to be tested (specifically, to Sn contained in the device to be tested) is achieved, and stable contact resistance can be maintained over a long period of time. Also disclosed is a connecting apparatus having the contact probe. The contact probe is to be repeatedly brought into contact with electrodes. A carbon film containing a metal element is formed on the surface of the contact probe to be brought into contact with the electrodes, and the concentration of the metal element on the surface of the carbon film is lower than the average concentration of the metal element in the whole carbon film.
Inventors:
HIRANO TAKAYUKI
KOBORI TAKASHI
KOBORI TAKASHI
Application Number:
PCT/JP2011/060782
Publication Date:
November 17, 2011
Filing Date:
May 10, 2011
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
KOBELCO RES INST INC (JP)
HIRANO TAKAYUKI
KOBORI TAKASHI
KOBELCO RES INST INC (JP)
HIRANO TAKAYUKI
KOBORI TAKASHI
International Classes:
G01R1/067
Foreign References:
| JP2002318247A | 2002-10-31 | |||
| JP2007024613A | 2007-02-01 | |||
| JP2001343397A | 2001-12-14 | |||
| JP2006216929A | 2006-08-17 | |||
| JP2007519829A | 2007-07-19 | |||
| JP2008282802A | 2008-11-20 |
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
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Claims: