Title:
CONTACT RESISTANCE MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/137770
Kind Code:
A1
Abstract:
[Problem] To individually measure contact resistances of two probes in contact with a single electrode that is an object to be measured. A processing unit 7: controls a connection switching unit 6 for shifting to a state where a probe PLc1 is connected to a power supply unit 2, a probe PLp1 is connected to a power supply unit 3, a probe PLp2 is connected to an arithmetic operation amplifier 4c, and a probe PLc2 is in non-connection; causes voltages V1 and V2 to be outputted from the power supply units 2, 3, respectively; changes the voltage V2 such that a current Iin flowing in an object 11 to be measured becomes zero; calculates a ratio R1/R2 from the voltage V2 at this time; controls the connection switching unit 6 for shifting to a state where the probe PLc1 is connected to the power supply unit 2 and the probe PLp1 is connected to the arithmetic operation amplifier 4c, and the probes PLc2, PLp2 are in non-connection; causes the voltage V1 to be outputted from the power supply unit 2 so as to measure the current Iin flowing in the probe PLp1; calculates a sum R1+R2 from the voltage V1 and a current I1; and individually calculates contact resistances R1, R2 from the calculated ratio and sum.
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Inventors:
TAKESAKO TOMOHIRO (JP)
WAKAMATSU HIDEAKI (JP)
IKEDA MASAKAZU (JP)
WAKAMATSU HIDEAKI (JP)
IKEDA MASAKAZU (JP)
Application Number:
PCT/JP2019/049732
Publication Date:
July 02, 2020
Filing Date:
December 19, 2019
Export Citation:
Assignee:
HIOKI ELECTRIC WORKS (JP)
International Classes:
G01R27/02; G01R31/26
Foreign References:
| JP2017223580A | 2017-12-21 | |||
| JP2011247833A | 2011-12-08 | |||
| JP2007155567A | 2007-06-21 | |||
| JPH0421877U | 1992-02-24 | |||
| US7030633B1 | 2006-04-18 | |||
| US20080061803A1 | 2008-03-13 |
Attorney, Agent or Firm:
SAKAI Shinji (JP)
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