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Title:
CONTACT UNIT AND INSPECTION JIG
Document Type and Number:
WIPO Patent Application WO/2023/047962
Kind Code:
A1
Abstract:
The present invention provides a contact unit provided with a flexible substrate, and a block for pressing at least a part of the flexible substrate toward an object being inspected, wherein at least a part of the block has electrical conductivity.

Inventors:
NAGATA TAKAHIRO (JP)
NOGUCHI MASAKI (JP)
Application Number:
PCT/JP2022/033645
Publication Date:
March 30, 2023
Filing Date:
September 08, 2022
Export Citation:
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Assignee:
YOKOWO SEISAKUSHO KK (JP)
International Classes:
G01R1/073; G01R31/26; G01R31/28; H01L21/66
Domestic Patent References:
WO2019021749A12019-01-31
Foreign References:
JP2020507771A2020-03-12
JP2019109102A2019-07-04
JP2019109101A2019-07-04
JP2019109103A2019-07-04
JPH10197560A1998-07-31
JP2016186484A2016-10-27
JPS644042A1989-01-09
US20120313659A12012-12-13
US20130220513A12013-08-29
Attorney, Agent or Firm:
HAYAMI Shinji et al. (JP)
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