CONTACTLESS CONVEYANCE DEVICE AND CONTACTLESS CONVEYANCE METHOD

WIPO Patent Application WO/2015/008539

A1

Provided is a contactless conveyance device and the like that is capable of stable and contactless conveyance and that prevents defective conveyance of a thin conveyed object. The contactless conveyance device (1) is such that a plurality of conveyance rails (2) are disposed along the direction of conveyance of the conveyed object, and the conveyed object is conveyed while being floated above the plurality of conveyance rails. The contactless conveyance device (1) is provided with: a fluid jetting means (6b) that is provided to the conveyance surface at the ends of the conveyance rails, and when the end of the conveyed object conveyed over the conveyance rails reaches a seam between adjacent conveyance rails or the vicinity thereof, jets a fluid at the end of the conveyed object, thus causing the floatation of the end; and a turbulent flow formation means that causes the air jetted from the fluid jetting means to be a turbulent flow. The turbulent flow formation means can be a concavity (6d) and/or convexity (6e) provided to the inside surface of the jetting opening of the fluid jetting means.

JP2011213465	LEVITATION CONVEYANCE DIRECTION TURNABOUT APPARATUS AND CONTROL METHOD THEREOF
JP2856001	[Title of Invention] Substrate Transfer Method
JPH0739970	AIR HOLD-UP APPARATUS FOR ALIGNED CAN END

TSUNODA KOUICHI (JP)
YASUDA TAKAHIRO (JP)

PCT/JP2014/063806

January 22, 2015

May 26, 2014

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OILES INDUSTRY CO LTD (JP)

B65G51/03; B65G49/06; H01L21/677

WO2010004800A1

2010-01-14

JP2006222209A	2006-08-24
JP2011235999A	2011-11-24

NAKAI JUN (JP)
Nakai 潤 (JP)

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