CONTACTOR CLEANING SHEET, CONTACTOR CLEANING SHEET MANUFACTURING METHOD, AND CONTACTOR CLEANING METHOD

Title:

CONTACTOR CLEANING SHEET, CONTACTOR CLEANING SHEET MANUFACTURING METHOD, AND CONTACTOR CLEANING METHOD

Document Type and Number:

WIPO Patent Application WO2002090054

Kind Code:

A3

Abstract:

A contactor cleaning sheet capable of concurrently cleaning the tip and side faces of a contactor, a contactor cleaning sheet manufacturing method, and a contact cleaning method; the cleaning sheet (10), comprising a base sheet (11), an abrasive grain dispersed foaming layer (12) containing abrasive grains formed on the surface of the base sheet (11), and a polishing layer (13) formed on the surface of the abrasive grain dispersed foaming layer (12); the method of manufacturing the cleaning sheet (10), comprising the steps of manufacturing a bubble dispersed paint by mechanically foaming a foam material formed with a foam resin and abrasive grains, applying the bubble dispersed paint on the surface of the base sheet (11), drying the paint, forming the abrasive grain dispersed foaming layer (12) on the surface of the base sheet (11), and forming the polishing layer (13) on the surface of the abrasive grain dispersed foaming layer (12).

More Like This:

WO/2020/161792	GUIDE RAIL MACHINING APPARATUS AND GUIDE RAIL MACHINING METHOD
JPS60123261	POLISHING DEVICE

Inventors:

SATO SATORU (JP)
SAKAMOTO AKIHIRO (JP)

Application Number:

PCT/JP2002/003335

Publication Date:

May 19, 2005

Filing Date:

April 03, 2002

Export Citation:

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Assignee:

NIPPON MICRO COATING KK (JP)
SATO SATORU (JP)
SAKAMOTO AKIHIRO (JP)

International Classes:

B24B19/00; B24B19/16; B24B29/08; B24D3/32; B24D11/00; G01R31/26; B24D15/04; B24D18/00; G01R1/06; G01R3/00; G01R31/28; G01R1/067; (IPC1-7): B24D15/04; B24D11/00; H01L21/66; G01R1/06; G01R31/28

Foreign References:

JPH10339766A	1998-12-22
JPS56119377A	1981-09-18
JPS637271A	1988-01-13
JP2000332069A	2000-11-30

Other References: