Title:
CONTAINER FOR SEMICONDUCTOR WAFER
Document Type and Number:
WIPO Patent Application WO/2004/087535
Kind Code:
A1
Abstract:
A container (B) for storing a semiconductor wafer (17) by selectively using a pair of outer shells (3) for a bottom part (1) and a cover part (2), wherein the outer shell (3) comprises an inside rise part (4) and an outside rise part (5) on the plate surface thereof. The inside rise part (4) forms a wafer storage space therein and the outside rise part (5) forms the outer wall of the container (B) and forms an opening in the outer shell (3) to isolate the wafer in the inside rise part (4) from the outer wall of the container. A boss (8) and a boss hole (9) in pairs are installed on the plate surface of the outer shell (3) on the outer surface side of the container (B) symmetrically with respect to a line. With the openings of the pair of outer shells (3) facing each other, the boss (8) of one outer shell is inserted into the boss hole (9) of the other outer shell to position both outer shells (3) and (3) in combination with each other.
Inventors:
FUYUMURO MASAHIKO (JP)
NAKAYAMA YOSHITAKA (JP)
NAKAYAMA YOSHITAKA (JP)
Application Number:
PCT/JP2004/004087
Publication Date:
October 14, 2004
Filing Date:
March 24, 2004
Export Citation:
Assignee:
ACHILLES CORP (JP)
FUYUMURO MASAHIKO (JP)
NAKAYAMA YOSHITAKA (JP)
FUYUMURO MASAHIKO (JP)
NAKAYAMA YOSHITAKA (JP)
International Classes:
H01L21/673; (IPC1-7): B65D85/38; H01L21/68
Foreign References:
| JPS62199027A | 1987-09-02 | |||
| JPH0494736U | 1992-08-17 | |||
| JPS5846437U | 1983-03-29 | |||
| JPH10142773A | 1998-05-29 |
Attorney, Agent or Firm:
Sugano, Ataru (Aruteru Akihabara 8F 1-8, Kandasakumach, Chiyoda-ku Tokyo 25, JP)
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