Title:
CONTAINER STORAGE DEVICE AND CONTAINER STORAGE METHOD
Document Type and Number:
WIPO Patent Application WO/2017/212841
Kind Code:
A1
Abstract:
[Problem] To suppress the deterioration of the surrounding environment due to gas leaking from a lid of a container. [Solution] This container storage device 1A is provided with: a purge device 23 that supplies a purging gas into a stored container 2; and a suctioning device 24 that is disposed near a lid 2c of the container 2 and suctions the atmosphere surrounding the lid 2c.
Inventors:
TSUBAKI TATSUO (JP)
YAMAJI TAKASHI (JP)
YAMAJI TAKASHI (JP)
Application Number:
PCT/JP2017/017377
Publication Date:
December 14, 2017
Filing Date:
May 08, 2017
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/677; H01L21/673
Foreign References:
| JP2016066689A | 2016-04-28 | |||
| JP2005327815A | 2005-11-24 | |||
| JPH05201506A | 1993-08-10 | |||
| JP2009065029A | 2009-03-26 |
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
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