Title:
CONTAINER FOR STORING WAFER
Document Type and Number:
WIPO Patent Application WO/2018/008879
Kind Code:
A1
Abstract:
The present invention relates to a container for storing a wafer, particularly to a container for storing a wafer in which a plurality of purging areas is vertically partitioned in the interior of a storage chamber, and a purge gas is sprayed into the plurality of purging areas, thereby allowing not only uniform purging of the wafer to be assured but also efficient purging of the wafer without waste of the purge gas to be achieved.
More Like This:
Inventors:
WOO BUM JE (KR)
YOON SEOK MUN (KR)
HEO JANG (KR)
KIM YOUNG CHUL (KR)
YOON SEOK MUN (KR)
HEO JANG (KR)
KIM YOUNG CHUL (KR)
Application Number:
PCT/KR2017/006703
Publication Date:
January 11, 2018
Filing Date:
June 26, 2017
Export Citation:
Assignee:
PICO & TERA CO LTD (KR)
WOO BUM JE (KR)
WOO BUM JE (KR)
International Classes:
H01L21/02; H01L21/673; H01L21/60; H01L21/67
Foreign References:
KR20150087154A | 2015-07-29 | |||
KR20080054354A | 2008-06-17 | |||
KR20150087703A | 2015-07-30 | |||
KR20140091909A | 2014-07-23 | |||
JP2006080458A | 2006-03-23 |
Attorney, Agent or Firm:
CHOI, Kwang Seok (KR)
Download PDF: