Title:
CONTINUOUS CHEMICAL VAPOR DEPOSITION PROCESS AND PROCESS FURNACE
Document Type and Number:
WIPO Patent Application WO2004007353
Kind Code:
A3
Abstract:
An apparatus and process is provided for continuously depositing solid carbon at atmospheric pressure onto the surfaces and in the porosity of a thin substrate material.
Inventors:
PRUETT JAMES G
AWASTHI SHRIKANT
AWASTHI SHRIKANT
Application Number:
PCT/US2003/022298
Publication Date:
June 10, 2004
Filing Date:
July 17, 2003
Export Citation:
Assignee:
HITCO CARBON COMPOSITES INC (US)
International Classes:
C23C16/26; C23C16/455; C23C16/46; C23C16/54; C23C16/44; (IPC1-7): C23C16/00; C23C16/26; C23C16/54; B32B1/00; B32B3/02
Foreign References:
US5547512A | 1996-08-20 | |||
US5048456A | 1991-09-17 | |||
US4031851A | 1977-06-28 | |||
US4863760A | 1989-09-05 | |||
US5252359A | 1993-10-12 | |||
US5354348A | 1994-10-11 |
Other References:
See also references of EP 1534874A4
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