Title:
CONTINUOUS COATING APPARATUS AND CONTINUOUS COATING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/095718
Kind Code:
A1
Abstract:
The present invention provides a continuous coating apparatus and a continuous coating method. The continuous coating apparatus comprises an auxiliary cavity and a working cavity. By pre-vacuumizing the auxiliary cavity, a sample can be directly transported from the auxiliary cavity to the working cavity. Since the working cavity does not need to be communicated with an external environment, the working cavity can be maintained at a preset vacuum degree, thus making an entire coating process continuous.
Inventors:
ZONG JIAN (CN)
Application Number:
PCT/CN2021/125454
Publication Date:
May 12, 2022
Filing Date:
October 22, 2021
Export Citation:
Assignee:
JIANGSU FAVORED NANOTECHNOLOGY CO LTD (CN)
International Classes:
C23C14/56
Foreign References:
| CN112281135A | 2021-01-29 | |||
| CN214218851U | 2021-09-17 | |||
| JPS5763677A | 1982-04-17 | |||
| CN108677160A | 2018-10-19 | |||
| CN201686740U | 2010-12-29 | |||
| US20120067279A1 | 2012-03-22 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW (CN)
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