CONTINUOUS FILM FORMING APPARATUS

Title:

CONTINUOUS FILM FORMING APPARATUS

Document Type and Number:

WIPO Patent Application WO/2010/024187

Kind Code:

A1

Abstract:

Provided is a continuous film forming apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed. The continuous film forming apparatus is provided with: a vacuum chamber (1); a film forming roll (2); evaporation sources (7L1, 7L2, 7R) which supply a film forming substance to a material from the side of the material which is wound on the film forming roll and on which a film is to be formed; a feeding unit (3) which supplies the material to the film forming roll (2); and a take-up unit (4) which takes up the material after the film is formed thereon. The vacuum chamber (1) is provided with: an evaporation source opening for carrying out and carrying in the evaporation sources; evaporation source door sections (16L, 16R) which open and close the evaporation source opening; another opening provided for the material on which the film is to be formed, besides the evaporation source opening, for the purpose of carrying out and carrying in the feeding unit (3) and the take-up unit (4); and door sections (17L, 17R) which are provided for the material and open and close the opening provided for the material.

Inventors:

TAMAGAKI HIROSHI
SEGAWA TOSHIKI

Application Number:

PCT/JP2009/064610

Publication Date:

March 04, 2010

Filing Date:

August 21, 2009

Export Citation:

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Assignee:

KOBE STEEL LTD (JP)
TAMAGAKI HIROSHI
SEGAWA TOSHIKI

International Classes:

C23C14/56

Domestic Patent References:

WO2008096510A1

2008-08-14

Foreign References:

JPS62230983A	1987-10-09
JP2001303249A	2001-10-31
JPH05320903A	1993-12-07
JPH05320881A	1993-12-07
JP2006077284A	2006-03-23
JP2008031492A	2008-02-14

Other References: