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Title:
CONTINUOUS HEAT TREATMENT FURNACE AND MANUFACTURING METHOD FOR CERAMIC ELECTRONIC COMPONENT USING SAME
Document Type and Number:
WIPO Patent Application WO/2016/208615
Kind Code:
A1
Abstract:
In this continuous heat treatment furnace (HF1), a heat treatment region in which heat treatment is performed on a workpiece along a conveyance direction (b) is provided. The workpiece is subjected to heat treatment while being conveyed in the heat treatment region (H). A workpiece conveyance mechanism (100) for conveying the workpiece is provided with: a box-shaped base frame (1) having an opening section in the upper part thereof; a porous plate (2); a gas chamber (3) that is formed by the porous plate (2) covering the opening section of the base plate (1); and a gas supply means (4) that is connected to the gas chamber (3) and that supplies, to the gas chamber (3), gas (g) to penetrate through the porous plate (2) to flow out. The porous plate (2) is arranged such that the upper surface (2a) thereof is downwardly inclined in the conveyance direction for the workpiece, and grooves (2t1 to 2t10) along the conveyance direction for the workpiece (W) are formed in the upper surface (2a).

Inventors:
NORIOKA TETSUHITO (JP)
NAKATANI YUKIHIRO (JP)
TAKAHATA TAKESHI (JP)
Application Number:
PCT/JP2016/068495
Publication Date:
December 29, 2016
Filing Date:
June 22, 2016
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F27B9/20; F27B9/24; F27D3/12; H01G4/12; H01G4/30; H01G13/00
Foreign References:
JPH08136144A1996-05-31
JP2008273727A2008-11-13
JP2015049020A2015-03-16
US1699955A1929-01-22
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
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