Title:
CONTINUOUS PROCESSING OF THIN-FILM BATTERIES AND LIKE DEVICES
Document Type and Number:
WIPO Patent Application WO2001073865
Kind Code:
A3
Abstract:
A system for making a thin-film device includes a substrate-supply station that supplies a substrate having a major surface area. The substrate has a first layer on a first surface area of the substrate's major surface area. Also included is a device for depositing a second layer onto the first layer, wherein the device supplies energy to the second layer to aid in layer formation without substantially heating the substrate.
Inventors:
JENSON MARK LYNN (US)
Application Number:
PCT/US2001/009438
Publication Date:
July 25, 2002
Filing Date:
March 23, 2001
Export Citation:
Assignee:
CYMBET CORP (US)
JENSON MARK LYNN (US)
JENSON MARK LYNN (US)
International Classes:
A61N1/378; B05C11/00; B05D5/12; C23C14/00; C23C14/06; C23C14/08; C23C16/00; C23C16/04; H01G9/00; H01G9/02; H01G9/025; H01G9/038; H01G9/155; H01L21/00; H01L21/302; H01L21/461; H01L23/58; H01L31/00; H01L31/073; H01L31/18; H01M4/04; H01M4/1391; H01M4/48; H01M4/88; H01M4/90; H01M6/00; H01M6/18; H01M6/40; H01M6/46; H01M10/04; H01M10/0562; H01M10/0585; H01M10/36; H01M10/38; H01M10/42; H01M10/46; H01M14/00; H01M50/103; H01M50/209; H01M50/403; H04M1/02; A61N1/372; G02F1/133; H01M4/02; H01M4/1393; H01M4/1397; H01M4/40; H01M4/52; H01M4/58; H01M6/42; H01M8/10; H01M8/12; H01M10/44; H05K1/16; (IPC1-7): H01M10/36; H01M10/46; H01L31/18; H01M6/18
Domestic Patent References:
| WO1997039491A1 | 1997-10-23 |
Foreign References:
| GB2318127A | 1998-04-15 | |||
| US4740431A | 1988-04-26 | |||
| US5189550A | 1993-02-23 | |||
| US5051274A | 1991-09-24 | |||
| US6094292A | 2000-07-25 | |||
| US5411592A | 1995-05-02 | |||
| US5763058A | 1998-06-09 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 018, no. 306 (P - 1752) 10 June 1994 (1994-06-10)
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 12 25 December 1997 (1997-12-25)
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 06 30 June 1997 (1997-06-30)
VEREDA F ET AL: "A study of electronic shorting in IBDA-deposited Lipon films", JOURNAL OF POWER SOURCES, ELSEVIER SEQUOIA S.A. LAUSANNE, CH, vol. 89, no. 2, August 2000 (2000-08-01), pages 201 - 205, XP004201951, ISSN: 0378-7753
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 01 31 January 1997 (1997-01-31)
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 12 25 December 1997 (1997-12-25)
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 06 30 June 1997 (1997-06-30)
VEREDA F ET AL: "A study of electronic shorting in IBDA-deposited Lipon films", JOURNAL OF POWER SOURCES, ELSEVIER SEQUOIA S.A. LAUSANNE, CH, vol. 89, no. 2, August 2000 (2000-08-01), pages 201 - 205, XP004201951, ISSN: 0378-7753
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 01 31 January 1997 (1997-01-31)
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