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Title:
CONTROL ASSISTANCE DEVICE AND CONTROL ASSISTANCE METHOD
Document Type and Number:
WIPO Patent Application WO/2023/167074
Kind Code:
A1
Abstract:
This control assistance device is for determining parameter values that are values of control parameters for controlling constituent elements in an air supply-exhaust system of a substrate processing device. The control assistance device comprises: a correspondence relationship acquisition unit for acquiring, from processing information indicating the state or operation concerning a process on a substrate by the substrate processing device, correspondence relationships between a plurality of parameter values and a plurality of model identification information items for respectively identifying a plurality of determination models for determining the normality degrees of operations of constituent elements; an information acquisition unit for acquiring a model identification information item corresponding to a determination model which is among the plurality of determination models and from which an appropriate determination result can be obtained from processing information during operation of a corresponding one of the constituent elements; and a decision unit for deciding a parameter value for controlling the constituent element on the basis of the model identification information item acquired by the information acquisition unit and a corresponding one of the correspondence relationships acquired by the correspondence relationship acquisition unit.

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Inventors:
YOSHIHARA KOKI (JP)
SEIWA TAKAAKI (JP)
Application Number:
PCT/JP2023/006489
Publication Date:
September 07, 2023
Filing Date:
February 22, 2023
Export Citation:
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Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/304; G05B11/36; H01L21/02
Domestic Patent References:
WO2018151215A12018-08-23
WO2020179729A12020-09-10
Foreign References:
JP2018186610A2018-11-22
JP2021168364A2021-10-21
JP2008187139A2008-08-14
JP2006091937A2006-04-06
JP2000003206A2000-01-07
Attorney, Agent or Firm:
NAKAGAWA, Masahiro et al. (JP)
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