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Title:
CONTROL DEVICE, LITHOGRAPHY DEVICE, AND METHOD FOR MANUFACTURING ARTICLE
Document Type and Number:
WIPO Patent Application WO/2022/030334
Kind Code:
A1
Abstract:
A control device for generating a control signal for controlling an object to be controlled comprises a plurality of neural networks, and a selector for selecting a neural network that is used to generate the control signal from among the plurality of neural networks. Each of the plurality of neural networks is selected by the selector so as to be used in execution of one control pattern corresponding thereto among a plurality of control patterns for controlling the object to be controlled.

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Inventors:
MORIKUNI YUICHIRO (JP)
Application Number:
PCT/JP2021/027967
Publication Date:
February 10, 2022
Filing Date:
July 28, 2021
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
G03F7/20; G05B13/02; G06N3/02
Domestic Patent References:
WO2019146007A12019-08-01
WO2019005547A12019-01-03
WO2019177905A12019-09-19
Foreign References:
JP2010086397A2010-04-15
JP2019071405A2019-05-09
Attorney, Agent or Firm:
OHTSUKA PATENT OFFICE, P.C. (JP)
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