CONTROL SYSTEM FOR ELECTROSTATIC CHUCK-EQUIPPED TRANSPORT ROBOT

WIPO Patent Application WO/2016/194336

A1

In a processing apparatus including a plurality of processing chambers for subjecting a workpiece to predetermined processes, a control system for an electrostatic chuck-equipped transport robot that transports the workpiece between the processing chambers using electrostatic attraction is configured to enable the electrostatic chuck to operate with good response characterisics. The transport robot control system according to the present invention is provided with: a robot control means Rc which is communicably connected to a central control means Mc for centrally controlling the operation of the processing apparatus, and which controls the operation of the transport robot Tr in accordance with a control signal from the central control means; and an electrostatic chuck control means Cc which controls the electrostatic attraction or release of the workpiece W with respect to the electrostatic chuck. The electrostatic chuck control means is configured to monitor the content of communications between the central control means and the robot control means, and, on the basis of the content of the communications being monitored, to control the electrostatic attraction or release of the workpiece by the electrostatic chuck.

SUZUKI TAKAYUKI (JP)
KAWAKUBO DAISUKE (JP)
MINAMI HIROFUMI (JP)
MUSHA KAZUHIRO (JP)

PCT/JP2016/002519

December 08, 2016

May 24, 2016

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ULVAC INC (JP)

H01L21/677; B25J15/00; B65G49/07; H02J50/90

JP5470460B2	2014-04-16
JP2012514511A	2012-06-28
JP2014527314A	2014-10-09

SEIGA PATENT AND TRADEMARK CORPORATION (JP)
SEIGA Patent and Trademark Corporation (JP)

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