Title:
CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MATERIAL
Document Type and Number:
WIPO Patent Application WO/2012/009108
Kind Code:
A3
Abstract:
A system for processing a substrate includes a light source to provide light pulses, a stage to support a substrate, optics to focus the light pulses onto the substrate, a scanner to scan the light pulses across the substrate, a computer to control properties of the light pulses and the scanning of the light pulses such that color centers are generated in various regions of the substrate, and at least one of (i) an ultraviolet light source to irradiate the substrate with ultraviolet light or (ii) a heater to heat the substrate after formation of the color centers to stabilize a transmittance spectrum of the substrate.
Inventors:
OSHEMKOV SERGEY (IL)
KLAESGES RALPH (DE)
MENGEL MARKUS (DE)
KRUGLYAKOV VLADIMIR (IL)
BEN-ZVI GUY (IL)
DMITRIEV VLADIMIR (IL)
ZAIT EITAN (IL)
LABOVITZ STEVEN (US)
KLAESGES RALPH (DE)
MENGEL MARKUS (DE)
KRUGLYAKOV VLADIMIR (IL)
BEN-ZVI GUY (IL)
DMITRIEV VLADIMIR (IL)
ZAIT EITAN (IL)
LABOVITZ STEVEN (US)
Application Number:
PCT/US2011/041155
Publication Date:
May 31, 2012
Filing Date:
June 21, 2011
Export Citation:
Assignee:
ZEISS CARL SMS LTD (IL)
ZEISS CARL SMT GMBH (DE)
ZEISS CARL SMS GMBH (DE)
OSHEMKOV SERGEY (IL)
KLAESGES RALPH (DE)
MENGEL MARKUS (DE)
KRUGLYAKOV VLADIMIR (IL)
BEN-ZVI GUY (IL)
DMITRIEV VLADIMIR (IL)
ZAIT EITAN (IL)
LABOVITZ STEVEN (US)
ZEISS CARL SMT GMBH (DE)
ZEISS CARL SMS GMBH (DE)
OSHEMKOV SERGEY (IL)
KLAESGES RALPH (DE)
MENGEL MARKUS (DE)
KRUGLYAKOV VLADIMIR (IL)
BEN-ZVI GUY (IL)
DMITRIEV VLADIMIR (IL)
ZAIT EITAN (IL)
LABOVITZ STEVEN (US)
International Classes:
G03F7/20; C03C23/00
Foreign References:
| EP2175310A1 | 2010-04-14 | |||
| US20030189031A1 | 2003-10-09 | |||
| US5147742A | 1992-09-15 | |||
| US20040202968A1 | 2004-10-14 | |||
| US20060118703A1 | 2006-06-08 | |||
| US20080203326A1 | 2008-08-28 |
Other References:
ROTHSCHILD M ET AL: "EFFECTS OF EXCIMER LASER IRRADATION ON THE TRANSMISSION, INDEX OF REFRACTION, AND DENSITY OF ULTRAVIOLET GRADE FUSED SILICA", APPLIED PHYSICS LETTERS, AIP, AMERICAN INSTITUTE OF PHYSICS, MELVILLE, NY, US, vol. 55, no. 13, 25 September 1989 (1989-09-25), pages 1276 - 1278, XP000081967, ISSN: 0003-6951, DOI: 10.1063/1.102471
HONG-BO SUN ET AL: "Generation and Recombination of Defects in Vitreous Silica Induced by Irradiation with a Near-Infrared Femtosecond Laser", THE JOURNAL OF PHYSICAL CHEMISTRY B, vol. 104, no. 15, 1 April 2000 (2000-04-01), pages 3450 - 3455, XP055022467, ISSN: 1520-6106, DOI: 10.1021/jp992828h
HONG-BO SUN ET AL: "Generation and Recombination of Defects in Vitreous Silica Induced by Irradiation with a Near-Infrared Femtosecond Laser", THE JOURNAL OF PHYSICAL CHEMISTRY B, vol. 104, no. 15, 1 April 2000 (2000-04-01), pages 3450 - 3455, XP055022467, ISSN: 1520-6106, DOI: 10.1021/jp992828h
Attorney, Agent or Firm:
WEFERS, Marc M. et al. (P.O. Box 1022Minneapolis, Minnesota, US)
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