Title:
CONTROLLER, STAGE DEVICE, EXPOSURE DEVICE, AND CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2013/161858
Kind Code:
A1
Abstract:
A controller is provided with: a control object (P(s)) having a stage on which an object is placed, a first member, and a second member connected to the stage and capable of moving in relation to the first member; a first filter (1-BPF(s)) for feeding back information related to the stage position of the control object in a frequency range that does not include the main resonance frequency in the frequency characteristics of the control object; and a second filter (BPF(s)) for feeding back information related to the position of the second member in a frequency range including the main resonance frequency in the frequency characteristics of the control object.
Inventors:
SAKATA KOICHI (JP)
Application Number:
PCT/JP2013/062020
Publication Date:
October 31, 2013
Filing Date:
April 24, 2013
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G05D3/12; G03F7/20; H01L21/027
Foreign References:
| JPH088159A | 1996-01-12 | |||
| JP2005245051A | 2005-09-08 | |||
| JP2009141283A | 2009-06-25 | |||
| JP2011233002A | 2011-11-17 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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