Title:
CONTROLLING DYNAMIC AND THERMAL LOADS ON LASER BEAM POSITIONING SYSTEM TO ACHIEVE HIGH THROUGHPUT LASER PROCESSING OF WORKPIECE FEATURES
Document Type and Number:
WIPO Patent Application WO/2010/077506
Kind Code:
A3
Abstract:
A method of accomplishing high-throughput laser processing of workpiece features (18) arranged in a densely spaced pattern minimizes workpiece feature processing inaccuracy and quality degradation that result from dynamic and thermal loads on laser beam positioning and optical components directing the laser beam during workpiece feature processing. A preferred embodiment is implemented with a laser beam positioning system (32) composed of a zero-inertia optical deflector of an acousto-optic beam deflector (AOD) or an electro-optical deflector (EOD) type, a galvanometer head (30), and a linear stage (34) cooperating to position the laser beam (16) among the workpiece features.
Inventors:
UNRATH MARK A (US)
Application Number:
PCT/US2009/066063
Publication Date:
September 16, 2010
Filing Date:
November 30, 2009
Export Citation:
Assignee:
ELECTRO SCIENT IND INC (US)
UNRATH MARK A (US)
UNRATH MARK A (US)
International Classes:
B23K26/04; H01L31/042
Foreign References:
| US20050279807A1 | 2005-12-22 | |||
| US20080017618A1 | 2008-01-24 | |||
| JP2942804B2 | 1999-08-30 | |||
| JPH01113191A | 1989-05-01 |
Attorney, Agent or Firm:
ANGELLO, Paul, S. (LLP900 SW Fifth Avenue,Suite 260, Portland Oregon, US)
Download PDF: